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1977). Thorough analyses of the problems concerning the threshold sensitivity of the ellipsometer are given by Alexandrov and Zapassky (1976), Aspnes (1975b, 1976),Azzam (1976%b), Jerrard (1960a),Smith and Hacsaylo (1963), and Svitashev et al. (1977b). C . Automation of Ellipsometric Measurements The problem of automation of ellipsometric measurements is extremely urgent today. Utilization of automated ellipsometric systems reduces the duration of a single measurement to some tens of milliseconds, as compared with 2-3 minutes when measuring by an ellipsometer with a hand control.

The final calculation results for the 4 x 4 matrices for the three basic ellipsometer schemes (see Fig. ) 2 + cos 2ypsin 4yc sin2 + 2rsrpsin A sin 2y, sin(2yc - 2y,) sin 6 Now one can easily calculate the Stokes parameters for the operating light beam at the output of the ellipsometer provided that the So,, Sl0, S2,, and S,, Stokes parameters, characterizing this beam at its input for all the ellipsometer schemes under consideration, are known. 28 A. V. RZHANOV A N D K. K . SVITASHEV In practice, the only parameter of the operating light beam that is measured at its output is the total intensity of this beam IOU, or the parameter Soout,which is the same.

3c). And angles t,h and A are calculated following the formulas containing the ratio of the light intensities at the output of the ellipsometer, measured at some fixed positions of the polarizer and analyzer. FIG. 3. Three modifications (a, b, c) of the basic schematic diagram of an ellipsometer: L, light source;W,, operating light beam; P, polarizer; C, compensator;A, analyzer; D, photodetector; S,sample under study. 22 A. V. RZHANOV AND K. K. SVITASHEV Thus, all the experimental techniques for determining the angles of polarization are in the end based on the measurement of the operating light beam intensity at the output of the ellipsometer.

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